Temperature and bias control of edge ring

ABSTRACT

Embodiments described herein provide methods and apparatus used to control a processing result profile proximate to a circumferential edge of a substrate during the plasma-assisted processing thereof. In one embodiment, a substrate support assembly features a first base plate and a second base plate circumscribing the first base plate. The first and second base plates each have one or more respective first and second cooling disposed therein. The substrate support assembly further features a substrate support disposed on and thermally coupled to the first base plate, and a biasing ring disposed on and thermally coupled to the second base plate. Here, the substrate support and the biasing ring are each formed of a dielectric material. The substrate support assembly further includes an edge ring biasing electrode embedded in the dielectric material of the biasing ring and an edge ring disposed on the biasing ring.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.17/009,670, filed on Sep. 1, 2020, which is a continuation of U.S.patent application Ser. No. 16/265,186, filed on Feb. 1, 2019, now U.S.Pat. No. 10,784,089, issued on Sep. 22, 2020, both of which are hereinincorporated by reference in their entireties.

BACKGROUND Field

Embodiments described herein generally relate to semiconductor devicemanufacturing, and in particular, to methods and apparatus used tocontrol a processing profile at, and proximate to, the circumferentialedge of a substrate during plasma-enhanced processing thereof.

Description of the Related Art

Plasma-assisted etching processes are well known and commonly usedprocesses of record (POR) in the manufacture of high-density integratedcircuits to pattern a material layer of a substrate by forming openingsthereinto. In a typical plasma-assisted etching process, a substrate ispositioned on a substrate support disposed in a processing chamber, anda plasma is formed there above. Ions from the plasma are thenaccelerated towards the substrate, and openings formed in a mask layerdisposed thereon to etch openings corresponding to the mask layeropenings in the material layer disposed beneath the mask surface.

Often, the substrate support is part of a substrate support assemblywhich further includes an annular ring, herein an edge ring, disposed onthe substrate support proximate to the circumference thereof. The edgering circumscribes the substrate and protects the dielectric material ofthe substrate support from erosion otherwise caused by the plasma.Unfortunately, electrical and thermal discontinuities between the edgeof the substrate and the portion of the edge ring disposed proximatethereto can cause undesirable processing result variation at thesubstrate edge. In a plasma-assisted etching process, undesirableprocessing result variation includes non-uniformity of, i.e.,differences between the etched opening profile in openings at theperimeter or edge of the substrate compared to the etched profile ofopenings in regions of the substrate disposed radially inwardly from thesubstrate edge or perimeter. Excessive processing result variationacross the surface of the edge of the substrate can adversely affect andsuppress device yield (the percentage of devices that conform toperformance specifications out of the total number of devicesmanufactured on the substrate).

Accordingly, there is a need in the art for apparatus and methods tocontrol processing result variation at the edge of a substrate duringplasma-assisted processing thereof.

SUMMARY

Embodiments described herein provide methods and apparatus used tocontrol a processing result profile proximate to a circumferential edgeof a substrate during the plasma-assisted processing thereof.

In one embodiment, a substrate support assembly features a first baseplate and a second base plate circumscribing the first base plate. Thefirst and second base plates each have one or more respective first andsecond cooling channels disposed therein. The substrate support assemblyfurther features a substrate support disposed on and thermally coupledto the first base plate, and a biasing ring disposed on and thermallycoupled to the second base plate. Here, the substrate support and thebiasing ring are each formed of a dielectric material. The substratesupport assembly further includes an edge ring biasing electrodeembedded in the dielectric material of the biasing ring and an edge ringdisposed on the biasing ring.

In another embodiment, a method of processing a substrate includesheating a substrate support of a substrate support assembly to a firsttemperature, heating an edge ring circumscribing the substrate supportto a second temperature, and positioning a substrate on the substratesupport. Here, the substrate support assembly is disposed in aprocessing volume of a processing chamber and features a first baseplate and a second base plate circumscribing the first base plate. Thefirst and second base plates each have one or more respective first andsecond cooling channels disposed therein. The substrate support assemblyfurther includes the substrate support disposed on and thermally coupledto the first base plate, and a biasing ring disposed on and thermallycoupled to the second base plate. The substrate support and the biasingring are each formed of a dielectric material. The substrate supportassembly further includes an edge ring biasing electrode embedded in thedielectric material of the biasing ring and the edge ring disposed onthe biasing ring. The method further includes flowing a processing gasinto the processing volume, igniting and maintaining a plasma of theprocessing gas, biasing the substrate using a first bias voltage, andbiasing the edge ring using a second bias voltage.

In another embodiment, a processing chamber includes a substrate supportassembly disposed in a processing volume of the processing chamber and acomputer-readable medium having instructions stored thereon forperforming a method of processing a substrate when executed by aprocessor. Here, the substrate support assembly includes a first baseplate and a second base plate circumscribing the first base plate. Thefirst and second base plates each have one or more respective first andsecond cooling channels disposed therein. The substrate support assemblyfurther includes a substrate support disposed on and thermally coupledto the first base plate, and a biasing ring disposed on and thermallycoupled to the second base plate. Here, the substrate support and thebiasing ring are each formed of a dielectric material. The substratesupport assembly further includes an edge ring biasing electrodeembedded in the dielectric material of the biasing ring and an edge ringdisposed on the biasing ring. The method of processing the substrateincludes heating the substrate support to a first temperature, heatingthe edge ring circumscribing the substrate to a second temperature, andpositioning a substrate on the substrate support. The method furtherincludes flowing a processing gas into the processing volume, ignitingand maintaining a plasma of the processing gas, biasing the substrateusing a first bias voltage, and biasing the edge ring using a secondbias voltage.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above-recited features of the presentdisclosure can be understood in detail, a more particular description ofthe disclosure, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlytypical embodiments of this disclosure and are therefore not to beconsidered limiting of its scope, for the disclosure may admit to otherequally effective embodiments.

FIG. 1 is a schematic cross-sectional view of a processing chamberfeaturing a substrate support assembly configured to practice themethods set forth herein, according to one embodiment.

FIG. 2A-2C are schematic cross-sectional views of a portion of asubstrate support assembly, according to other embodiments, which may beused in the plasma processing chamber described in FIG. 1 .

FIG. 3A-3B are schematic cross-sectional views of a portion of asubstrate support assembly, according to other embodiments, which may beused in the processing chamber described in FIG. 1 .

FIGS. 4A-4C are close-up views of a portion of FIG. 1 schematicallyillustrating various plasma sheath profiles formed using the methods setforth herein.

FIGS. 4D-4E are close-up views of a portion of FIG. 1 schematicallyillustrating the effect of various edge ring temperatures using themethods set forth herein.

FIG. 5A is a schematic cross-sectional view of a portion of a substratesupport assembly, according to another embodiment, which may be used inthe processing chamber described in FIG. 1 .

FIG. 5B is a schematic cross-sectional view of a portion of a substratesupport assembly, according to another embodiment, which may be used inthe processing chamber described in FIG. 1 .

FIGS. 6A-6B show comparative measurements of normalized criticaldimension (CD) shrinkage proximate to the edges of substrates processedusing embodiments of the methods set forth herein.

FIGS. 7A-7B show comparative measurements of normalized etch rateproximate to the edges of substrates processed using the same processingconditions set forth respectively in FIGS. 6A-6B.

FIG. 8 is a flow diagram setting forth a method of processing asubstrate according to embodiments described herein.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements and features disclosed inone embodiment may be beneficially incorporated in other embodimentswithout specific recitation thereof.

DETAILED DESCRIPTION

Embodiments described herein provide methods and apparatus used tocontrol a processing result profile proximate to a circumferential edgeof a substrate during the plasma-assisted processing thereof. Inparticular, the methods and apparatus herein provide for selectiveelectrical biasing and for temperature control of an annular ring,herein an edge ring circumferentially disposed about the surface of thesubstrate support assembly on which a to be processed substrate will besupported. The biasing and temperature control of the edge ring isindependent of the biasing and temperature control of a substratesupport having the to be processed substrate disposed thereon.

Independent biasing and temperature control between the substratesupport and the edge ring enables fine tuning of the processing resultprofile proximate to the edge of the substrate. For example, in aplasma-assisted etching process, the processing results on the substrateproximate to the substrate edge, e.g., within 15 mm of the edge, oftendeviate from the processing results on the substrate at locationsradially inward from the substrate edge. This processing resultnon-uniformity is often attributable to corresponding discontinuities orchanges in the properties of a plasma used to perform a process on thesubstrate which is formed over the substrate, here where the plane ofthe major surface of the substrate is processed in a horizontalposition. Discontinuities or changes in the properties of the processingplasma include changes in the shape of the plasma region over thesubstrate and changes in the degree of ionization of processing gasesforming the plasma across the plasma. Typically, these discontinuitiesor changes in the processing plasma are more pronounced in regionsdisposed above the edge region of the substrate and the edge ringproximate thereto, as compared to regions over the substrate andinwardly of the edge of the substrate. Therefore, the apparatus andmethods provided herein enable fine control of both edge ring biasingand edge ring temperature to ameliorate these differences.

Often previous substrate processing operations, such as materialdeposition operations, e.g., CVD, PVD, and ALD processes, or materialremoval operations, e.g., chemical mechanical polishing (CMP) and wet ordry etching processing, may cause a feature profile deviation ormaterial thickness deviation between the center region and the edgeregions of the substrate. In such circumstances, the fine control ofboth edge ring biasing and edge ring temperature enabled by embodimentsdescribed herein may be used to compensate for the center-to-edgenon-uniformities from the previous substrate processing operations.

Edge ring biasing facilitates tuning the shape of the plasma in regionsdisposed above and proximate to the substrate edge by controlling theshape of a plasma sheath, as shown and described in FIGS. 1 and 4A-4C.Where the plasma sheath curves, the trajectories of ions pulled towardsthe biased substrate are different than the trajectories of ions pulledtowards the substrate from a plasma when the sheath is parallel to thesubstrate surface. Controlling the edge ring temperature affects theconcentration of reactive neutral species, e.g., radicals and activatedmolecules, in the processing gases, and thus tunes the chemicalreactions involving the reactive neutrals in regions disposed above andproximate to the substrate edge.

FIG. 1 is a schematic cross-sectional view of a plasma processingchamber configured to practice the methods set forth herein, accordingto one embodiment. In this embodiment, the processing chamber is aplasma etch processing chamber, such as a reactive ion etch (RIE) plasmachamber. In other embodiments, the processing chamber is aplasma-enhanced deposition chamber, for example, a plasma-enhancedchemical vapor deposition (PECVD) chamber, a plasma-enhanced physicalvapor deposition (PEPVD) chamber, or a plasma-enhanced atomic layerdeposition (PEALD) chamber. In other embodiments, the processing chamberis a plasma treatment chamber or a plasma-based ion implant chamber, forexample, a plasma doping (PLAD) chamber or a physical vapor deposition(PVD) chamber. Herein, the processing chamber includes an inductivelycoupled plasma (ICP) source electrically coupled to a radio frequency(RF) power supply. In other embodiments, the plasma source is acapacitively coupled plasma (CCP) source, such as a plasma electrodedisposed in the processing volume where the plasma electrode iselectrically coupled to an RF power supply and capacitively couplesenergy and power into the plasma in the chamber.

The processing chamber 100 features a chamber body 101, including achamber lid 102, one or more sidewalls 103, and a chamber base 104,which collectivity define a processing volume 105. The processing volume105 is fluidly coupled to a processing gas source 106, which deliversprocessing gases thereinto. The processing chamber 100 further includesa plasma generator 107 configured to ignite and maintain a plasma 108 ofthe processing gas(es) introduced into the processing volume through theprocessing gas source. The plasma generator 107 includes one or moreinductive coils 109 disposed proximate to the chamber lid 102 at alocation outside of the processing volume 105. The one or more inductivecoils 109 are electrically coupled to an RF power supply 110. The plasmagenerator 107 is used to ignite and maintain the plasma 108 byinductively coupling energy from the inductive coils 109 powered by theRF power supply 110 into the processing gas(es). Here, the processingvolume 105 is fluidly coupled to a vacuum source, such as one or morededicated vacuum pumps to maintain the processing volume 105 atsub-atmospheric pressure and evacuate processing, and other gases,therefrom. Typically, the processing chamber includes a systemcontroller 111, which is used to control the operation of the processingchamber and implement the methods set forth herein.

Herein, the system controller 111 includes a programmable centralprocessing unit, herein the CPU 112, that is operable with a memory 113(e.g., non-volatile memory) and support circuits 114. The supportcircuits 114 are conventionally coupled to the CPU 112 and comprisecache, clock circuits, input/output subsystems, power supplies, and thelike, and combinations thereof coupled to the various components of theprocessing chamber 100, to facilitate control thereof. The CPU 112 isone of any form of general purpose computer processor used in anindustrial setting, such as a programmable logic controller (PLC), forcontrolling various components and sub-processors of the processingchamber 100. The memory 113, coupled to the CPU 112, is non-transitoryand is typically one or more of readily available memories such asrandom access memory (RAM), read only memory (ROM), floppy disk drive,hard disk, or any other form of digital storage, local or remote.

Typically, the memory 113 is in the form of a computer-readable storagemedia containing instructions (e.g., non-volatile memory), that whenexecuted by the CPU 112, facilitates the operation of the processingchamber 100. The instructions in the memory 113 are in the form of aprogram product such as a program that implements the methods of thepresent disclosure. The program code may conform to any one of a numberof different programming languages. In one example, the disclosure maybe implemented as a program product stored on computer-readable storagemedia for use with a computer system. The program(s) of the programproduct define functions of the embodiments (including the methodsdescribed herein).

Illustrative computer-readable storage media include, but are notlimited to: (i) non-writable storage media (e.g., read-only memorydevices within a computer such as CD-ROM disks readable by a CD-ROMdrive, flash memory, ROM chips or any type of solid-state non-volatilesemiconductor memory) on which information is permanently stored; and(ii) writable storage media (e.g., floppy disks within a diskette driveor hard-disk drive or any type of solid-state random-accesssemiconductor memory) on which alterable information is stored. Suchcomputer-readable storage media, when carrying computer-readableinstructions that direct the functions of the methods described herein,are embodiments of the present disclosure. In some embodiments, themethods described herein, or portions thereof, are performed by one ormore application specific integrated circuits (ASICs),field-programmable gate arrays (FPGAs), or other types of hardwareimplementations. In some other embodiments, the processes describedherein are performed by a combination of software routines, ASIC(s),FPGAs and, or, other types of hardware implementations.

The processing chamber 100 further includes a substrate support assembly115 disposed in the processing volume 105. The substrate supportassembly 115 is disposed on a support shaft 116 sealingly extendingthrough the chamber base 104, such as being surrounded by a bellows (notshown) in a region below the chamber base 104 or in a region disposedbetween the substrate support assembly 115 and the chamber base 104.Typically, a substrate 117 is loaded into the processing volume 105through an opening (not shown) in one of the one or more sidewalls 103,which is conventionally sealed with a door or a valve (not shown) duringsubstrate processing. Transferring of the substrate 117 to and from thesubstrate support assembly 115 is facilitated by a plurality of liftpins 118 movably disposed therethrough. In a raised position, the liftpins 118 extend above a surface of the substrate support assembly 115,lifting the substrate 117 therefrom and enabling access to the substrate117 by a robot handler (not shown). In a lowered position, the uppersurfaces (not shown) of the lift pins 118 are flush with, or disposedbelow, the surface of the substrate support assembly 115, and thesubstrate 117 rests thereon.

Here, the substrate support assembly 115 includes a substrate support119 disposed on, and thermally coupled to, a first base plate 120, and asecond base plate 121 circumscribing the first base plate 120. Thesubstrate support 119 is formed from a dielectric material, such as abulk sintered ceramic material, such as silicon carbide (SiC) or a metaloxide or metal nitride ceramic material, for example, aluminum oxide(Al₂O₃), aluminum nitride (AlN), titanium oxide (TiO), titanium nitride(TiN), yttrium oxide (Y₂O₃), mixtures thereof, and combinations thereof.The substrate support 119 is thermally coupled to the first base plate120 by a thermally conductive adhesive or by mechanical means, includinga thermally conductive material, such as a thermally conductive andphysically conforming gasket or other conductive material, disposedbetween the first base plate 120 and the substrate support 119. In someembodiments, one or both of the first base plate 120 and the second baseplate 121 are formed of a corrosion-resistant thermally conductivematerial, such as a corrosion-resistant ceramic or metal, for examplealuminum, an aluminum alloy, stainless steel, or aluminum nitride (AlN).

The substrate support assembly 115 further includes a biasing ring 122disposed on the second base plate 121 and an edge ring 123 disposed overthe biasing ring 122. The biasing ring 122 is typically made of adielectric material having an electrode embedded therein. The dielectricmaterial can be one or a combination of the ceramic materials which maybe used to form the substrate support 119 as set forth above. Typically,the edge ring 123 is formed of a thermally and electrically conductivematerial, such as silicon, graphite, silicon carbide, or a combinationthereof. In some embodiments, the edge ring 123 is thermally coupled tothe biasing ring 122 by a thermally conductive material 124, such as asilicone gasket, interposed therebetween. In other embodiments, thethermally conductive material 124 comprises a silicone or acrylic basedtape or paste.

In some embodiments, protective rings 125 a-b are disposed between theedge ring 123 and the biasing ring 122 and on the inner and outercircumferential sides of the thermally conductive material 124, toprotect the thermally conductive material 124 from processing gas andplasma caused corrosion by preventing exposure thereto. The firstprotective ring 125 a circumscribes the thermally conductive material124 and is thus disposed proximate to and radially outward therefrom.The second protective ring 125 b is disposed radially inward of thethermally conductive material 124 and proximate thereto. Here, theprotective rings 125 a-b are formed of a processing gas and plasmaresistant polymer. Examples of suitable polymers include one or morefluorine-containing polymers (fluoropolymer), such as perfluoroalkoxy(PFA), fluorinated ethylene propylene (FEP), polytetrafluoroethylene(PTFE) commercially available as TEFLON® from DuPont, or combinationsthereof.

In other embodiments, the edge ring 123 is disposed directly on thebiasing ring 122 and is in direct contact therewith. Typically, in thoseembodiments, the interfacial surfaces of one or both of the edge ring123 and the biasing ring 122 are polished during the manufacturingthereof. The polished interfacial surfaces of the edge ring 123 and thebiasing ring 122 result in increased surface contact area relative tounpolished surfaces and thus desirably increased heat transfer ratestherebetween. In some embodiments, the a DC power supply 141 iselectrically coupled to an electrode embedded in the biasing ring 122,such as the edge ring biasing electrode 136 or a second electrode (notshown). In those embodiments, the edge ring biasing electrode 136 or thesecond electrode is used to ensure close contact and thus high thermaltransfer rate between the biasing ring 122 and the edge ring 123 byproviding a potential between the edge ring 123 and the edge ringbiasing electrode or the second electrode which results in anelectrostatic (ESC) attraction force therebetween.

Here, the substrate support 119 includes one or more chucking electrodes126 embedded in a dielectric material thereof. The one or more chuckingelectrodes 126 are used to secure the substrate 117 to the substratesupport 119 by providing a potential between the substrate 117 and thechucking electrode(s) 126 which results in an electrostatic (ESC)attraction force therebetween. Here, the one or more chucking electrodes126 are coupled to a chucking power source 127, such as a DC powersupply, which provides a chucking voltage thereto.

The substrate support assembly 115 is further configured to bias one orboth the edge ring 123 and the substrate 117 with respect to the plasma108 formed there above. Typically, the substrate 117 is biased throughcapacitive coupling with an electrode having a substrate biasing voltageapplied thereto. The electrode used to provide the bias may be disposedin or beneath the dielectric material of the substrate support 119. Insome embodiments, biasing the substrate 117 comprises applying asubstrate biasing voltage to the chucking electrode 126 disposed in thedielectric material of the substrate support 119. In those embodiments,the chucking electrode 126 is electrically coupled to both the chuckingpower source 127 and the biasing power source 134 (electrical couplingbetween the biasing power source 134 and the chucking electrode 126 isshown in phantom). In those embodiments, the chucking electrode 126 isused to provide both the substrate bias and the DC chucking potential.In some embodiments, biasing the substrate 117 includes applying asubstrate biasing voltage from a biasing power source 134 to the firstbase plate 120, which is electrically coupled to the biasing powersource 134. In other embodiments, biasing the substrate 117 comprisesapplying a biasing voltage to a substrate biasing electrode (not shown)embedded in the dielectric material of the substrate support 119. Whenused, a substrate biasing electrode is typically electrically isolatedfrom the chucking electrode 126 by dielectric material of the substratesupport 119 disposed therebetween. Typically, the biasing power source134 provides one or a combination of continuous wave (CW) RF power,pulsed RF power, CW DC power, or pulsed DC power.

Biasing the edge ring 123, independently of biasing the substrate 117,includes applying an edge ring biasing voltage to an edge ring biasingelectrode 136. Here, the edge ring biasing electrode 136 is embedded inthe dielectric material of the biasing ring 122 and is electricallycoupled to the biasing power source 134 through a tuning circuit 137disposed therebetween. In other embodiments, the edge ring biasingelectrode 136 is electrically coupled to a second biasing power source140 which is different from the biasing power source 134 (electricalcoupling between the edge ring biasing electrode 136 and the secondbiasing power source 140 is shown in phantom). Independent biasing ofthe edge ring 123 and the substrate 117 allows fine control of the shapeof a plasma sheath 138 a proximate to the circumferential edge of thesubstrate 117. The plasma sheath 138 a typically defines a dark-spaceboundary region disposed between the bulk of the plasma 108 and thesurfaces of the substrate 117 and the edge ring 123 facing the plasma108. Controlling the shape of the plasma sheath 138 a is furtherdiscussed in the description set forth with respect to FIGS. 4A-4Cbelow.

In some embodiments, one or both of the first base plate 120 and thesecond base plate 121 are formed of a thermally conductive electricallyinsulating material, such as metal nitride ceramic material, for examplealuminum nitride (AlN). Forming one or both of the first and second baseplates 120 and 121 of a thermally conductive electrically insulatingmaterial desirably prevents or substantially eliminates cross-talkbetween the edge ring biasing electrode 136 and an electrode used toprovide a biasing power the substrate, e.g., a substrate biasingelectrode (described above but not shown) or the chucking electrode 126when the biasing power source 134 is electrically coupled thereto.“Cross-talk” as used herein is the undesirable electrical interferencebetween the powers provided to each of the electrodes which mayundesirably interfere with the ability to independently control thebiasing powers thereto. Typically, cross-talk results from thecapacitive coupling of electrodes and an otherwise electricallyconductive base plate or base plates, e.g., aluminum base plates,through the relatively thin dielectric materials of the substratesupport or biasing ring disposed therebetween.

Here, the substrate support assembly 115 further includes one or morefirst heating elements 128 embedded in the dielectric material of thesubstrate support 119 and one or more first cooling channels 129disposed in the first base plate 120. The one or more first heatingelements 128 are used to heat the substrate support 119, and thus thesubstrate 117 disposed thereon, to a desired temperature beforeprocessing and to maintain the substrate 117 at a desired temperatureduring processing. The one or more first cooling channels 129 arefluidly coupled to, and in fluid communication with, a coolant source(not shown), such as a refrigerant source or modified water sourcehaving a relativity high electrical resistance. The first base plate 120is used to regulate the temperature of the substrate support 119, andthus the temperature of a substrate 117 disposed on the substratesupport 119, during substrate processing. The first heating element(s)128 and the coolant flow through the first cooling channels 129 may beused alone or in combination to facilitate fine control of thetemperature of the substrate support 119 and thus fine control of thetemperature of the substrate 117 disposed thereon.

The temperature of the edge ring 123 is maintained and controlledindependently of the temperature of the substrate 117 using one or bothof a second heating element 130 and a second cooling channel 131. Inthis embodiment, the second heating element 130 comprises a resistiveheating element embedded in the dielectric material of the biasing ring122. The second heating element 130 is used to heat the biasing ring122, and thus heat the edge ring 123 thermally coupled to the biasingring 122, to a desired temperature before substrate processing and, incombination with a coolant flowing through the second cooling channel131, to maintain the edge ring at a desired temperature during substrateprocessing. Here, the biasing ring 122 is thermally insulated from thesubstrate support 119 by a first insulator ring 132 interposedtherebetween.

Here, the second cooling channel 131, disposed in the second base plate121, is fluidly coupled to and in fluid communication with a coolantsource (not shown) which may be the same as or different from thecoolant source used to deliver cooling fluid to the first coolingchannel(s). In embodiments where the same coolant source is used, thecoolant flowrate through the first and second cooling channels isindependently controlled to facilitate independent temperature controlof the first and second base plates 120, 121 respectively. Typically,the second base plate 121 is thermally isolated from the first baseplate 120 by a second insulator ring 133 interposed therebetween. Thefirst and second insulator rings 132, 133 are typically formed of amaterial suitable for inhibiting heat transfer between the substratesupport 119 and the biasing ring 122 and between the first and secondbase plates 120 and 121 respectively. Examples of suitable materialswhich may be used for the thermal insulator rings 132, 133 include PTFE,quartz, silicone, and combinations thereof. In some embodiments, athermal insulator ring is not used and the first base plate and thesecond base plate are spaced apart and thermally isolated from oneanother by a vacuum provided in the space therebetween.

Here, the substrate support assembly 115 further includes one or moretemperature sensors, such as the thermocouple 135, disposed in orproximate to dielectric material of the biasing ring 122. Thethermocouple 135 is used to monitor the temperature of the biasing ring122 and thus the temperature of the edge ring 123 thermally coupledthereto. In some other embodiments, one or both of the substrate support119 and the edge ring 123 are heated using a dedicated heater thereforedisposed there beneath, such as shown in FIG. 2A. In some otherembodiments, both the substrate support 119 and the edge ring 123 aredisposed on a common baseplate, such as shown in FIG. 3 .

FIG. 2A is a schematic cross-sectional view of a portion of a substratesupport assembly 200 a, according to one embodiment, which may be usedin place of the substrate support assembly 115 in the processing chamber100 described in FIG. 1 . Here, a first heater, such as the firstheating plate 201 is interposed between the substrate support 119 andthe first base plate 120 and a second heater, such as the second heatingplate 202, is interposed between the biasing ring 122 and the secondbase plate 121. The first heating plate 201 is thermally isolated fromthe second heating plate 202 by the first insulator ring 132 disposedtherebetween. The second base plate 121 is thermally isolated from thefirst base plate 120 by a second insulator ring 133 interposedtherebetween.

FIG. 2B is a schematic cross-sectional view of a portion of a substratesupport assembly 200 b, according to one embodiment, which may be usedin place of the substrate support assembly 115 in the processing chamber100 described in FIG. 1 . Here, the substrate support assembly 200 a issimilar to the substrate support assembly 115 described in FIG. 1 andfurther includes a first electrically insulating plate 203 and a secondelectrically insulating plate 204. The first electrically insulatingplate 203 is interposed between the substrate support 119 and the firstbase plate 120. The second electrically insulating plate 204 isinterposed between the biasing ring 122 and the second base plate 121.Here, the second electrically insulating plate 204 circumscribes thefirst electrically insulating plate 203 and is thermally isolatedtherefrom by one or both of the first insulator ring 132 and the secondinsulator ring 133 interposed therebetween.

Typically, one or both of the first and second electrically insulatingplates 203 and 204 are formed of a thermally conductive electricallyinsulating material, such as metal nitride ceramic material, forexample, aluminum nitride (AlN). The electrically insulating plates 203and 204 desirably prevent or substantially eliminate cross-talk betweenthe edge ring biasing electrode 136 and an electrode used to provide abiasing power to the substrate, e.g., a substrate biasing electrode(described above but not shown) or the chucking electrode 126 when thebiasing power source 134 is electrically coupled thereto. In someembodiments, one or both of the electrically insulating plates 203 and204 have a thickness sufficient to substantially eliminate orsignificantly reduce capacitive coupling of the respective electrodesdisposed there above with the respective base plates disposed therebelow. For example, in some embodiments, one or both of the electricallyinsulating plates 203 and 204 have a thickness of more than about 5 mm,such as more than about 10 mm, or for example, between about 5 mm andabout 50 mm.

FIG. 2C is a schematic cross-sectional view of a portion of a substratesupport assembly 200 c, according to one embodiment, which may be usedin place of the substrate support assembly 115 in the processing chamber100 described in FIG. 1 . Here, the substrate support assembly 200 c issimilar to the substrate support assembly 115 described in FIG. 1 andfurther includes an electrically insulating plate 204 interposed betweenthe second base plate 121 and the biasing ring 122. The substratesupport assembly 200 c does not include the electrically insulatingplate 203 described in FIG. 2B, and the first base plate 120 issupported by at least a portion of a facility plate 205. The facilityplate 205 provides structural support to the substrate support assembly200 c and may be used with one or any combination of embodimentsdescribed herein. In other embodiments, the substrate support assemblymay include the electrically insulating plate 203 and not include theelectrically insulating plate 204. Including one of the electricallyinsulating plates and not the other reduces the manufacturing costs ofthe substrate support assembly while still reducing or substantiallyeliminating the cross-talk between biasing electrodes.

FIG. 3A is a schematic cross-sectional view of a portion of a substratesupport assembly 300 b, according to another embodiment, which may beused in place of the substrate support assembly 115 in the processingchamber 100 described in FIG. 1 . Here, both the substrate support 119and the biasing ring 122 are disposed on a common base plate 301. Thetemperature of the base plate 301 is regulated using one or more coolingchannels 302 disposed therein. The one or more cooling channels 302 arefluidly coupled to, and in fluid communication with, a coolant source(not shown), such as a refrigerant source or modified water sourcehaving a relativity high electrical resistance. The base plate 301 isused to regulate the temperature of the substrate support 119 and thebiasing ring 122, and thus the temperature of a substrate 117 and anedge ring 123 respectively disposed on the substrate support 119 and thebiasing ring 122, during substrate processing. Here, the substratesupport 119 and the biasing ring 122 are thermally insulated from eachother by an insulator ring 303 interposed therebetween. In thisembodiment, each of the substrate support 119 and the biasing ring 122include a respective heating element 128, 130 embedded in the dielectricmaterial thereof. In other embodiments, the substrate support 119 andthe biasing ring 122 are heated using heating plates, such as theheating plates 201, 202 shown in FIG. 2 .

Typically, the biasing ring 122, and thus the edge ring 123 disposedthereon, is maintained at a desired temperature or within a desiredrange of temperatures using measurements provided by the one or morethermocouples 135. The measured temperature(s) are communicated to thesystem controller 111 which compares the measured temperature(s) to adesired temperature set point or a desired temperature range. If themeasured temperature falls below the desired temperature set point orbelow the desired temperature range the system controller 111 willincrease heat flow into the edge ring 123. Typically, heat flow to theedge ring 123 is increased by applying, or increasing, a power providedto a second heating element 130, shown in FIGS. 1 and 3 , or to a secondheating plate 202, shown in FIG. 2 . If the measured temperature risesabove the desired temperature set point or above the desired temperaturerange, the system controller 111 will remove heat from the edge ring123. Typically, heat is removed from the edge ring 123 by turning off orlowering the power applied to the biasing ring 122, changing the coolantflow rate to the second base plate 121, shown in FIGS. 1 and 2 , or thecombined base plate, shown in FIG. 3A, or a combination thereof. In someembodiments, the substrate support assembly 300 a further includes oneor both of the first electrically insulating plate 203 and the secondelectrically insulating plate 204 (shown in FIG. 2B) respectivelyinterposed between the base plate 301 and the substrate support 119 orthe base plate 301 the biasing ring 122.

FIG. 3B is a schematic cross-sectional view of a portion of a substratesupport assembly 300 b, according to one embodiment, which may be usedin place of the substrate support assembly 115 in the processing chamber100 described in FIG. 1 . Here, the substrate support assembly 300 bfurther includes a common electrically insulating plate 304 interposedbetween the common base plate 301 and the substrate support 119 andbiasing ring 122. The electrically insulating plate 304 may be formed ofthe same material and have the same thickness as described above withrespect to the first and second electrically insulating plates 203 and204.

FIGS. 4A-4C are schematic cross-sectional views of a portion of theprocessing chamber 100 shown in FIG. 1 respectively illustrating variousshapes of plasma sheaths 138 a-c proximate to the edge of the substrate117. Herein, the shapes of the plasma sheaths 138 a-c are controlled byadjusting the ratio of biasing voltages applied to the substrate 117,and to the edge ring 123, using the methods set forth herein. Typically,increasing the bias voltage provided to the edge ring 123 results inrelatively thicker plasma sheath 138 b above the edge ring 123 whencompared to an edge ring 123 having a lower, or no, bias voltage appliedthereto.

In FIG. 4A the plasma sheath 138 a has a uniform thickness across aregion disposed above the substrate 117 and a region disposed above aportion of the edge ring 123 proximate to the substrate 117. The uniformthickness of the plasma sheath 138 a facilitates the acceleration ofions from the plasma 108 towards the surface of the substrate 117 in atrajectory 401, which is substantially uniform and orthogonal to thesurface of the substrate 117 proximate to the edge thereof.

In FIG. 4B the plasma sheath 138 b is thicker in the region disposedabove the edge ring 123 than in the region disposed above the substrate117. As shown in FIG. 4B, the plasma sheath 138 b bends away from theedge of the substrate 117 in the region disposed there above. Here, thetrajectory 401 of ions from the plasma 108 to the edge of the substrate117 disposed there below is angled towards the edge ring 123. Thus, theion trajectory 401 proximate to the edge of the substrate in FIG. 4B isless focused than in FIGS. 4A and 4C, and the etch rate at proximate tothe edge of the substrate is comparatively reduced.

In FIG. 4C, the plasma sheath 138 c is thinner in the region disposedabove the edge ring 123 than in the region disposed above the substrate117. As shown in FIG. 4C, the plasma sheath bends towards the edge ofthe substrate 117 in the region disposed there above. Here, thetrajectory 401 of ions from the plasma 108 towards the substrate 117 isangled away from the edge ring 123 around the circumference of thesubstrate 117. Thus, the ion trajectory 401 proximate to the edge of thesubstrate in FIG. 4C is more focused than in FIGS. 4A and 4B and theconcentration of ions bombarding the substrate, and thus the etch rate,proximate to the edge of the substrate is comparatively increased. Byreducing or increasing the focus of the ion trajectory 401 proximate tothe edge of the substrate 117, the etch rate can be tuned to berespectively slower or faster at the edge when compared to the rest ofthe substrate disposed radially inward therefrom.

In addition to increasing or decreasing the focus of ions bombarding thesubstrate surface proximate to the substrate edge, tuning the curvatureof the plasma sheath changes the directionality of the openings etchedin the material layer(s) thereof. For example, in FIG. 4A thetrajectories 401 of ions striking the substrate surface proximate to theedge of the substrate are substantially perpendicular thereto, and theopenings (not shown) formed therefrom will be substantiallyperpendicular to the substrate surface. In FIGS. 4B and 4C, thetrajectories 401 of ions are respectively angled away from or towardsthe center of the substrate 117 and the resulting openings formedtherefrom will be angled accordingly. Thus the angle of the etchedopenings can be tuned by the edge ring bias power in order to compensatethe effects where other chamber components result in feature tilting onthe edge of the substrate, such as non-uniform plasma distribution dueto plasma source or bias, or edge ring thinning over the usefulproduction lifetime of the substrate support.

FIGS. 4D and 4E schematically illustrate the effect of the edge ringtemperature on the neutral reactive species concentration above andproximate to the edge of the substrate. Here, the edge ring 123 in FIG.4D is maintained at a lower temperature than the edge ring 123 in FIG.4E. The etch rate profile and polymer deposition profile from locationsat the edge of the substrate to locations disposed radially inwardtherefrom are schematically represented by arrows 405 and 407,respectively. When the edge ring temperature is relativity low (FIG.4D), more polymerizing species 403 tend to deposit on the edge ring 123,resulting in lower concentration of polymerizing species above the edgering 123 and near the substrate edge. Thus, comparatively less polymerdeposits on the substrate edge, which results in an edge-high etch rateprofile, i.e., an increased etch rate at the edge of the substratecompared to regions disposed radially inward therefrom. On the otherhand, when the edge ring temperature is relatively high (FIG. 4E), lesspolymer deposition will occur on the edge ring 123 and there is higherpolymerizing species concentration near the substrate edge. Thus,comparatively more polymer deposits on the substrate edge result in anedge-slow etch rate profile, i.e., a decreased etch rate at the edge ofthe substrate compared to regions disposed radially inward therefrom.

In other embodiments, the high bias power applied on the edge ring canfunction in part as the elevated edge ring temperature to reduce polymerdeposition on the edge ring, thus increasing polymerizing speciesconcentration above the substrate edge. In other embodiments, the biaspower applied on the edge ring can be a tuning knob to increase ordecrease the sensitivity of the process near the substrate edge to theedge ring temperature.

FIGS. 5A and 5B are schematic cross-sectional views of a portion of asubstrate support assembly according to some embodiments, which may becombined with one or a combination of other embodiments of the substratesupport assemblies described herein. In FIG. 5A, the substrate supportassembly 500 a may be any one of the substrate support assemblies shownin FIGS. 1-4 or set forth in the descriptions thereof and furtherincludes an electrically insulating ring 502 made of a dielectricmaterial, such as a quartz or a metal oxide ceramic, disposed on theedge ring 123. Typically, the plasma-facing surface of the electricallyinsulating ring 502 will have a lower etch rate than the plasma-facingsurface of the edge ring 123 (when the electrically insulating ring 502is not disposed thereon) and thus will desirably extend the substrateprocessing lifetime of the substrate support assembly 500 a. In otherembodiments, the electrically insulating ring 502 is formed of amaterial that is less likely to generate particles in the chamber forthe sake of defect control.

FIG. 5B is a schematic cross-sectional view of a portion of a substratesupport assembly, according to another embodiment, which may be used inthe processing chamber described in FIG. 1 . In FIG. 5B, the substratesupport assembly 500 b may be any one of or comprise any combination ofthe features of the substrate support assemblies shown and described inFIGS. 1-3 . Here, the edge ring 123 extends above a plane of theplasma-facing surface of the substrate by a height H, i.e., theplasma-facing surface of the edge ring 123 stands taller than theplasma-facing surface of the substrate 117. Typically, if the processingconditions and biasing conditions are the same, the thickness of thesheath disposed above the edge ring will be the same. Assuming theprocessing conditions and biasing conditions shown in FIG. 4A, extendingthe plasma-facing surface of the edge ring 123 above the plane of theplasma-facing surface of the substrate 117 will also push the sheathupwards to create a plasma profile resembling the plasma profile of FIG.4B. Thus, extending the plasma-facing surface of the edge ring 123 abovethe plane of the plasma-facing surface of the substrate 117 will allowfor the formation of the plasma profile of FIG. 4B at relativity reducededge ring biasing power when compared to a coplanar biasing ring andsubstrate surface configuration. In other embodiments, the edge ring 123will be recessed from a plane of the surface of the substrate and, forthe same processing conditions described in FIG. 4A, the resultingplasma profile will more closely resemble the plasma profile of FIG. 4C.

Charts 600 a-b of FIGS. 6A-6B, respectively, show comparativemeasurements of normalized critical dimension (CD) shrinkage proximateto the edges of substrates processed using embodiments of the methodsset forth herein. Charts 700 a-b of FIGS. 7A-7B, respectively, showcomparative measurements of normalized etch rate proximate to the edgesof substrates processed using the same processing conditions set forthrespectively in FIGS. 6A-6B.

CD shrinkage enables the patterning of openings in the surface of asubstrate where the openings have a dimension, which is less than alithography-defined dimension in a photoresist layer disposed thereabove. Typically, the photoresist layer is formed on a multi-layer maskdisposed on the to be etched surface of the substrate to be processed.Openings in the photoresist layer and multi-layer mask are formed byforming a plasma of a processing gas comprising an etchant and apolymerizing gas and exposing a substrate, having the multi-layer maskand the photoresist layer formed thereon, to the plasma. Thepolymerizing gas forms a polymerized passivation layer on the sidewallsof the openings being etched into the multi-layer stack to decrease theCD of the etched features as they are formed therein. Thus, thedimensions of the openings formed in the surface of the substrate arereduced and thus shrunk when compared to the lithography-defineddimensions patterned in the photoresist layer. Typically, thepolymerized passivation layer forms faster on a relatively coldersurface than that on a warmer surface due to a higher stickingcoefficient, and thus absorption, of the polymerizing species on thecolder surface.

In FIGS. 6A-6B and 7A-7B, each of the substrates was processed byforming a plasma of an etchant gas and a polymerizing gas, biasing thesubstrate, and exposing the substrate to the plasma. Here, the etchantand polymerizing gas included CHF₃ at a flowrate of 100 sccm, CF₄ at 50sccm, N₂ at 100 sccm, Ar at 100 sccm. The substrates were biased using abiasing power of 0.14 W/cm² of substrate surface area, and the edge ringbias was varied between about 10 W and about 60 W. Each of thesubstrates processed had a radius of 150 mm. CD shrinkage, shown inFIGS. 6A-6B, was measured at a plurality of radial locations disposedbetween about 105 mm and about 145 mm from the center of the substrate.An etch rate example, shown in FIGS. 7A-7B, was measured at a pluralityof radial locations disposed between about 100 mm and about 150 mm fromthe center of the substrate.

In FIG. 6A, the edge ring was biased using a lower bias voltage than thebias voltage applied to the edge ring in FIG. 6B. In FIGS. 6A and 6B,respectively, substrates 601 a-b, 602 a-b, and 603 a-b were processedusing edge rings maintained at three different temperatures relative tothe temperature of a substrate support having the substrate disposedthereon. For substrates 601 a,b, the temperature of the edge ring wasmaintained at about 30° C. less than the temperature of the substratesupport to provide a temperature differential of Δ−30° C. therebetween.For substrates 602 a,b, the temperature of the edge ring was maintainedat about 40° C. more than the temperature of the substrate support toprovide a temperature differential of Δ+40° C. therebetween. Forsubstrates 603 a,b, the edge ring temperature was maintained at aboutthe same temperature as the substrate support to provide a temperaturedifferential of Δ 0° C. therebetween.

In both FIGS. 6A and 6B, decreasing the temperature of the edge ringrelative to the substrate 601 a,b reduces CD shrinkage at the edge ofthe substrate compared to CD shrinkage measured at sites disposedradially inward therefrom. In both FIGS. 6A and 6B, increasing thetemperature of the edge ring relative to the substrates 602 a,bincreases CD shrinkage at the edge of the substrate compared to CDshrinkage measured at sites disposed radially inward therefrom. As shownin FIGS. 6A and 6B, tuning the edge ring temperature is an effectivetuning knob to tune the CD profile at the edge of the substrate.

Notably, the effect of varying the edge ring temperature has a morepronounced effect on both reducing and increasing CD shrinkage at theedge of the substrate when the edge ring is biased using a relativelylower bias voltage, as shown in FIG. 6A, than when the edge ring isbiased using the higher edge ring bias voltage, as shown in FIG. 6B.This suggests that controlled biasing of the edge ring can enlarge orreduce the temperature turning effect of the edge ring by controllingthe thickness of the plasma sheath formed there above.

FIGS. 7A-7B show comparative measurements of the etch rate example,proximate to the edge of a substrate processed using embodiments of themethods set forth herein. In FIG. 7A, the edge ring was biased using alower bias voltage than the bias voltage applied to the edge ring inFIG. 7B. Here, the substrates 701 a-b, 702 a-b, and 703 a-b wereprocessed using the same processing conditions, respectively set forthfor the substrates 601 a-b, 602 a-b, and 603 a-b of FIGS. 6A and 6B. Forsubstrates 701 a, b, the temperature of the edge ring was maintained atabout 30° C. less than the temperature of the substrate support toprovide a temperature differential of Δ−30° C. therebetween. Forsubstrates 702 a,b the temperature of the edge ring was maintained atabout 40° C. more than the temperature of the substrate support toprovide a temperature differential of Δ+40° C. therebetween. Forsubstrates 703 a, b, the edge ring temperature was maintained at aboutthe same temperature as the substrate support to provide a temperaturedifferential of Δ 0° C. therebetween.

In both FIGS. 7A and 7B, decreasing the temperature of the edge ringrelative to the temperature of the substrates 601 a,b generallyincreases the etch rate measured at the edge of the substrate comparedto etch rates measured radially inward therefrom. In both FIGS. 7A and7B, increasing the temperature of the edge ring relative to thetemperature of the substrates 702 a,b decreased the etch rate measuredat the edge of the substrate compared to etch rates measured radiallyinward therefrom.

Similar to the CD shrinkage measurements set forth in FIGS. 6A and 6B,the effect of varying the edge ring temperature is more pronounced inboth reducing and increasing the etch rate towards the edge of thesubstrate when the edge ring is biased using a relatively lower biasvoltage, as shown in FIG. 7A, than when the edge ring is biased usingthe higher edge ring bias voltage, as shown in FIG. 7B. This againsuggests that controlled biasing of the edge ring can enlarge or reducethe temperature turning effect of the edge ring by controlling thethickness of the plasma sheath formed there above.

FIG. 8 is a flow diagram setting forth a method 800 of processing asubstrate using a substrate support assembly configured according toembodiments described herein. At activity 801, the method includespositioning a substrate on a substrate support assembly disposed in aprocessing volume of a processing chamber, such as the processingchamber described in FIG. 1 . Here, the substrate support assemblyfeatures a first base plate and a second base plate circumscribing thefirst base plate. Each of the first and second base plates includes oneor more first and second channels respectively disposed therein. Thesubstrate support assembly further includes a substrate support disposedon and thermally coupled to the first base plate, and a biasing ringdisposed on and thermally coupled to the second base plate. Here thesubstrate support and the biasing ring are each formed of a dielectricmaterial. The biasing ring further includes an edge ring biasingelectrode embedded in the dielectric material of the biasing ring and anedge ring disposed on the biasing ring.

At activities 802 and 803, the method 800 includes respectively heatingthe substrate to a first temperature and heating an edge ringcircumscribing the substrate to a second temperature. Typically, thesubstrate support, and thus the substrate disposed thereon, is heated tothe first temperature using a first heater disposed between thesubstrate support and the first base plate or embedded in the dielectricmaterial of the substrate support. The biasing ring, and thus the edgering disposed thereon, is heated to the second temperature using asecond heater disposed between the biasing ring and the second baseplate or embedded in the dielectric material of the biasing ring. Insome embodiments, the method 800 further includes maintaining thesubstrate at a desired temperature or within a desired range oftemperatures and maintaining the edge ring at a desired temperature orwithin a desired range of temperatures. Here, the temperatures of theedge ring and substrate support are controlled independently from oneanother. Controlling the edge ring temperature enables tuning of thepolymerizing species concentration near the edge ring and proximate tothe edge of the substrate within the plasma, thus tuning the processprofile.

At activities 804 and 805, the method 800 respectively includes flowinga processing gas into the processing volume of a processing chamber andigniting and maintaining a plasma of the processing gas.

At activities 806 and 807, the method 800 respectively includes biasingthe substrate using a first bias voltage and biasing the edge ring usinga second bias voltage. Here, biasing the substrate includes applying thefirst bias voltage to one of the first base plate, a chucking electrodeembedded in the dielectric material of the substrate support, or abiasing electrode embedded in the dielectric material of the substratesupport. Biasing the edge ring includes applying the second bias voltageto an edge ring biasing electrode embedded in the dielectric material ofthe biasing ring.

At activity 808, the method 800 includes determining a ratio of thefirst bias voltage and the second bias voltage. At activity 809, themethod 800 includes adjusting the second bias voltage to achieve atarget voltage ratio. In some embodiments, the first bias voltage ismaintained at a constant voltage while the second bias voltage isadjusted to achieve the target voltage ratio.

The methods described herein beneficially allow for fine control andtuning of plasma properties in regions disposed above and proximate tothe edge of the substrate being processed. Fine control and tuning ofthe plasma properties allows for fine control and tuning of processingresult profiles at the substrate edge. Benefits of embodiments hereinfurther include eliminating or substantially reducing substrate tosubstrate processing variation otherwise attributable to a steady risein the temperature of an edge ring not having temperature control afterthe processing chamber has been sitting idle, e.g., first wafer effect.

While the foregoing is directed to embodiments of the presentdisclosure, other and further embodiments of the disclosure may bedevised without departing from the basic scope thereof, and the scopethereof is determined by the claims that follow.

The invention claimed is:
 1. A substrate processing system, comprising:a substrate support assembly, comprising: a base plate; a first biaselectrode disposed over the base plate and spaced apart from the baseplate by a first portion of dielectric material; a second portion ofdielectric material disposed over the first bias electrode, the secondportion of dielectric material forming a substrate supporting surface; asecond bias electrode disposed a distance from a center of the substratesupporting surface and spaced apart from the first bias electrode by athird portion of dielectric material; a pulsed DC bias system configuredto deliver a first pulsed DC voltage to the first bias electrode and asecond pulsed DC voltage to the second bias electrode, the pulsed DCbias system comprising a first pulsed DC power supply that iselectrically coupled to the first bias electrode; and a chucking powersupply electrically coupled to the first bias electrode, the chuckingpower supply configured to provide a DC chucking voltage forelectrically clamping a substrate to the substrate supporting surface.2. The substrate processing system of claim 1, wherein the second biaselectrode is spaced apart from a plasma-facing surface of the substratesupport assembly by a fourth portion of dielectric material disposedtherebetween.
 3. The substrate processing system of claim 1, wherein thesecond bias electrode is electrically coupled to a second pulsed DCpower supply.
 4. The substrate processing system of claim 1, furthercomprising an edge ring disposed over the second bias electrode, theedge ring surrounding the substrate supporting surface.
 5. The substrateprocessing system of claim 1, wherein the second bias electrode iselectrically coupled to the first pulsed DC power supply.
 6. Thesubstrate processing system of claim 5, further comprising a tuningcircuit configured to adjust the second pulsed DC voltage relative tothe first pulsed DC voltage.
 7. The substrate processing system of claim1, further comprising a non-transitory computer-readable medium havinginstructions stored thereon for performing a method of processing asubstrate when executed by a processor, the method comprising: (a)igniting and maintaining a plasma in a processing volume of a processingchamber, the processing volume having the substrate support assemblydisposed therein; (b) applying a chucking voltage to the first biaselectrode to electrically clamp the substrate to the substratesupporting surface; (c) applying the first pulsed DC voltage to thefirst bias electrode; and (d) applying the second pulsed DC voltage tothe second bias electrode.
 8. The substrate processing system of claim7, wherein the method further comprises: (e) adjusting the second pulsedDC voltage relative to the first pulsed DC voltage.
 9. The substrateprocessing system of claim 7, further comprising: a chamber lid, one ormore chamber walls, and a chamber base which collectively define theprocessing volume, wherein a plurality of electrodes are disposed in theprocessing volume, the plurality of electrodes comprising the baseplate, the first bias electrode, and the second bias electrode; and anRF power supply electrically coupled to one of the plurality ofelectrodes which is configured to ignite and maintain the plasma throughcapacitive coupling therewith.
 10. A substrate processing system,comprising: a chamber lid, one or more chamber walls, and a chamber basewhich collectively define a processing volume, a plurality of electrodesdisposed in the processing volume, the plurality of electrodescomprising a base plate, a first bias electrode, and a second biaselectrode; a substrate support assembly, comprising: the base plate; thefirst bias electrode disposed over the base plate and spaced apart fromthe base plate by a first portion of dielectric material; a secondportion of dielectric material disposed over the first bias electrode,the second portion of dielectric material forming a substrate supportingsurface; the second bias electrode disposed a distance from a center ofthe substrate supporting surface and spaced apart from the first biaselectrode by a third portion of dielectric material; and an edge ring,disposed over the second bias electrode to surround the substratesupporting surface; and a non-transitory computer-readable medium havinginstructions stored thereon for performing a method of processing asubstrate when executed by a processor, the method comprising: (a)igniting and maintaining a plasma in the processing volume; (b) applyinga chucking voltage to the first bias electrode to electrically clamp asubstrate to the substrate supporting surface; (c) applying a firstpulsed DC voltage to the first bias electrode; (d) applying a secondpulsed DC voltage to the second bias electrode; and (e) adjusting thesecond pulsed DC voltage relative to the first pulsed DC voltage. 11.The substrate processing system of claim 10, wherein the first biaselectrode and the second bias electrode are each electrically coupled toa first pulsed DC power supply, and the second pulsed DC voltage isadjusted relative to the first pulsed DC voltage by use of a tuningcircuit.
 12. The substrate processing system of claim 10, wherein thefirst bias electrode is electrically coupled to a first pulsed DC powersupply, the second bias electrode is electrically coupled to a second DCpower supply, and the second DC power supply is independently operablefrom the first pulsed DC power supply.